NanoFocus AG

NanoFocus AG is a developer, manufacturer, and distributor of optical 3D measurement technology and software packages for the characterization of technical surfaces. The metrology systems work at high measurement and analysis speeds for laboratory applications as well as for inline quality assurance and use near production lines.

Technology leader for optical 3D surface metrology
NanoFocus AG’s analysis systems allow high precision micro and nano scale 3D surface measurements. The innovative systems enable extremely fast, easy and contactless 3D measurements of topography, micro-geometry, roughness or other surface characteristics. The company has been active in this field since 1994.

Our products: powerful measurement systems and software
The product portfolio of NanoFocus contains three lines of measurement systems: the μsurf 3D metrology systems, the μscan 2D/3D profilometers and the ultra-fast μsprint 3D in-line sensors – all based on the optical confocal principle developed and patented by NanoFocus. From standard system to customized business solution, we offer the best and effective measurement solution for each measurement task. The hardware is complemented by the analysis software µsoft, also developed by NanoFocus. It produces detailed metrology reports in compliance with the latest international standards and includes powerful automation features.


The role of the three Fraunhofer institutes within Powerbase consists in supporting key technology developments of their industry collaboration partners by advanced material characterization methods, failure analysis, in-line inspection and process optimization, focusing on optimum manufacturing yield, process quality and application reliability of future advanced power electronics materials and components.  Within this context, Fraunhofer will also act as task leader within the work package 6 focusing on GaN reliability.

Key Contribution:

NanoFocus AG metrology tools are capable of acquiring most accurate and precise topography information from highly dynamic surface structures within very short cycle times. NanoFocus AG will develop and implement a specialized metrology process to assure sustainable worldwide competitiveness of the intended European GaN packaging line and will contribute this process and its capabilities to the GaN packaging pilot line and related WP partners.

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NanoFocus AG

Lindnerstraße 98
46149 Oberhausen, Germany